Inventor
AUTH NICOLE
DE10 patents
⚠️ This page may combine multiple inventors who share the name “AUTH NICOLE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
6 patentsUS11650495B2May 16, 2023
Apparatus and method for determining a position of an element on a photolithographic mask
ZEISS CARL SMT GMBH0 citations61
US11385540B2Jul 12, 2022
Apparatus and method for determining a position of an element on a photolithographic mask
ZEISS CARL SMT GMBH0 citations61
US12135540B2Nov 5, 2024
Devices and methods for examining and/or processing an element for photolithography
ZEISS CARL SMT GMBH0 citations57
US11487211B2Nov 1, 2022
Device and method for processing a microstructured component
ZEISS CARL SMT GMBH0 citations54
US12586755B2Mar 24, 2026
Apparatus for analyzing and/or processing a sample with a particle beam and method
ZEISS CARL SMT GMBH0 citations51
US12535729B2Jan 27, 2026
Method and apparatus for mask repair
ZEISS CARL SMT GMBH0 citations50
AUTH NICOLE
4 patentsUS8632687B2Jan 21, 2014
Method for electron beam induced etching of layers contaminated with gallium
AUTH NICOLE14 citations81
US9023666B2May 5, 2015
Method for electron beam induced etching
AUTH NICOLE5 citations70
US8623230B2Jan 7, 2014
Methods and systems for removing a material from a sample
AUTH NICOLE3 citations60
US8318593B2Nov 27, 2012
Method for electron beam induced deposition of conductive material
AUTH NICOLE0 citations49