Inventor
RIAHI SHANTIA
US5 patents
Patents
5 patentsUS4851255AJul 25, 1989
Ion implant using tetrafluoroborate
AIR PROD & CHEM40 citations90
US4855604AAug 8, 1989
Ion Beam implant system
AIR PROD & CHEM24 citations89
US6946158B2Sep 20, 2005
Deposition of titanium amides
AIR PROD & CHEM2 citations58
US6602783B1Aug 5, 2003
Deposition of titanium amides
AIR PROD & CHEM2 citations58
US4760263AJul 26, 1988
Ion implant using tetrafluoroborate
AIR PROD & CHEM0 citations49