Inventor
MA MINGYANG
CN6 patents
⚠️ This page may combine multiple inventors who share the name “MA MINGYANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
3 patentsUS11053591B2Jul 6, 2021
Multi-port gas injection system and reactor system including same
ASM IP HOLDING BV4 citations69
US12378665B2Aug 5, 2025
High temperature coatings for a preclean and etch apparatus and related methods
ASM IP HOLDING BV1 citations60
US12006572B2Jun 11, 2024
Reactor system including a gas distribution assembly for use with activated species and method of using same
ASM IP HOLDING BV1 citations58