Inventor
YAMARTINO STEPHEN J
US7 patents
Patents
7 patentsUS5375424ADec 27, 1994
Cryopump with electronically controlled regeneration
HELIX TECH CORP50 citations92
US5156007AOct 20, 1992
Cryopump with improved second stage passageway
HELIX TECH CORP31 citations92
US5137050AAug 11, 1992
Pressure relief valve and cryopump utilizing the same
HELIX TECH CORP27 citations90
US5862671AJan 26, 1999
Purge and rough cryopump regeneration process, cryopump and controller
HELIX TECH CORP38 citations89
US5775109AJul 7, 1998
Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor
HELIX TECH CORP40 citations89
US6327863B1Dec 11, 2001
Cryopump with gate valve control
HELIX TECH CORP28 citations84
US6510697B2Jan 28, 2003
System and method for recovering from a power failure in a cryopump
HELIX TECH CORP14 citations79