Inventor
SCHMIEGE BENJAMIN
US26 patents
⚠️ This page may combine multiple inventors who share the name “SCHMIEGE BENJAMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
23 patentsUS9449843B1Sep 20, 2016
Selectively etching metals and metal nitrides conformally
APPLIED MATERIALS INC399 citations99
US9309598B2Apr 12, 2016
Oxide and metal removal
APPLIED MATERIALS INC560 citations99
US10083834B2Sep 25, 2018
Methods of forming self-aligned vias
APPLIED MATERIALS INC64 citations98
US10465294B2Nov 5, 2019
Oxide and metal removal
APPLIED MATERIALS INC25 citations94
US9528183B2Dec 27, 2016
Cobalt removal for chamber clean or pre-clean process
APPLIED MATERIALS INC25 citations93
US9390940B2Jul 12, 2016
Methods of etching films comprising transition metals
APPLIED MATERIALS INC13 citations84
US10906925B2Feb 2, 2021
Ruthenium precursors for ALD and CVD thin film deposition and uses thereof
APPLIED MATERIALS INC2 citations73
US10577386B2Mar 3, 2020
Ruthenium precursors for ALD and CVD thin film deposition and uses thereof
APPLIED MATERIALS INC2 citations73
US9896770B2Feb 20, 2018
Methods of etching films with reduced surface roughness
APPLIED MATERIALS INC2 citations73
US9540736B2Jan 10, 2017
Methods of etching films with reduced surface roughness
APPLIED MATERIALS INC2 citations73
US9514933B2Dec 6, 2016
Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition
APPLIED MATERIALS INC3 citations73
US10643840B2May 5, 2020
Selective deposition defects removal by chemical etch
APPLIED MATERIALS INC2 citations70
US9881787B2Jan 30, 2018
Deposition methods for uniform and conformal hybrid titanium oxide films
APPLIED MATERIALS INC2 citations69
US11094544B2Aug 17, 2021
Methods of forming self-aligned vias
APPLIED MATERIALS INC0 citations62
US10643838B2May 5, 2020
In-situ formation of non-volatile lanthanide thin film precursors and use in ALD and CVD
APPLIED MATERIALS INC0 citations52
US10410865B2Sep 10, 2019
Methods of forming self-aligned vias
APPLIED MATERIALS INC0 citations52
US10323054B2Jun 18, 2019
Precursors for deposition of metal, metal nitride and metal oxide based films of transition metals
APPLIED MATERIALS INC0 citations52
US10297462B2May 21, 2019
Methods of etching films comprising transition metals
APPLIED MATERIALS INC0 citations52
US10242885B2Mar 26, 2019
Selective dry etching of metal films comprising multiple metal oxides
APPLIED MATERIALS INC0 citations52
US10233547B2Mar 19, 2019
Methods of etching films with reduced surface roughness
APPLIED MATERIALS INC0 citations52
US9799533B2Oct 24, 2017
Methods of etching films comprising transition metals
APPLIED MATERIALS INC0 citations52
US9005704B2Apr 14, 2015
Methods for depositing films comprising cobalt and cobalt nitrides
APPLIED MATERIALS INC0 citations52
US10760159B2Sep 1, 2020
Methods and apparatus for depositing yttrium-containing films
APPLIED MATERIALS INC0 citations51
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
3 patentsUS10000853B2Jun 19, 2018
System and method for controllable non-volatile metal removal
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations72
US9611552B2Apr 4, 2017
System and method for controllable non-volatile metal removal
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations62
US10633743B2Apr 28, 2020
System and method for controllable non-volatile metal removal
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51