Inventor

ROY SUSMIT SINGHA

US35 patents

⚠️ This page may combine multiple inventors who share the name “ROY SUSMIT SINGHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ROY SUSMIT SINGHA

APPLIED MATERIALS INC

Methods of forming self-aligned vias

Linerless continuous amorphous metal films

PECVD tungsten containing hardmask films and methods of making

Methods of forming self-aligned vias and air gaps

Hardmask layer for 3D NAND staircase structure in semiconductor applications

Methods of etching metal oxides with less etch residue

Thick tungsten hardmask films deposition on high compressive/tensile bow wafers

Metal and metal-derived films

Low temperature growth of transition metal chalcogenides

Super-conformal germanium oxide films

Defect free germanium oxide gap fill

PECVD tungsten containing hardmask films and methods of making

Volumetric expansion of metal-containing films by silicidation

Self-aligned structures from sub-oxides

Conformal high concentration boron doping of semiconductors

Nucleation-free gap fill ALD process

Selective deposition of carbon films and uses thereof

Fluorine-doped nitride films for improved high-k reliability

Methods of forming self-aligned vias

Ultra-thin diffusion barriers

Selective and self-limiting tungsten etch process

Methods of forming self-aligned vias and air gaps

Ultra-thin diffusion barriers

Methods of etching metal oxides with less etch residue

Metal and metal-derived films

Electronic device fabrication using area-selective deposition

Bottom-up approach to high aspect ratio hole formation in 3D memory structures

Self-aligned high aspect ratio structures and methods of making

Oxidative volumetric expansion of metals and metal containing compounds

Methods of forming self-aligned vias

Boron doped tungsten carbide for hardmask applications

Oxidative volumetric expansion of metals and metal containing compounds

Conformal silicon-germanium film deposition

Mircomaterials LLC

Self-aligned contact and contact over active gate structures

MICROMATERIALS LLC

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