P

Inventor

OHKUNI MITSUHIRO

JP12 patents
⚠️ This page may combine multiple inventors who share the name “OHKUNI MITSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

8 patents
US5404079AApr 4, 1995

Plasma generating apparatus

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD136 citations98
US6210593B1Apr 3, 2001

Etching method and etching apparatus

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD35 citations92
US5345145ASep 6, 1994

Method and apparatus for generating highly dense uniform plasma in a high frequency electric field

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD33 citations92
US5332880AJul 26, 1994

Method and apparatus for generating highly dense uniform plasma by use of a high frequency rotating electric field

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD44 citations92
US6187688B1Feb 13, 2001

Pattern formation method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD44 citations91
US7268083B2Sep 11, 2007

Plasma etching apparatus and plasma etching process

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations62
US6355183B1Mar 12, 2002

Apparatus and method for plasma etching

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations62
US6582551B2Jun 24, 2003

Apparatus for plasma etching having rotating coil responsive to slide valve rotation

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations51

MATSUSHITA ELECTRONICS CORP

2 patents
US6274502B1Aug 14, 2001

Method for plasma etching

MATSUSHITA ELECTRONICS CORP9 citations73
US6409877B1Jun 25, 2002

Apparatus and method for plasma etching

MATSUSHITA ELECTRONICS CORP1 citations51

MATSUSHITA ELECTRIC COMPANY LT

1 patent
US5424905AJun 13, 1995

Plasma generating method and apparatus

MATSUSHITA ELECTRIC COMPANY LT9 citations69

PANASONIC CORP

1 patent
US7494827B2Feb 24, 2009

Plasma etching method and plasma etching apparatus

PANASONIC CORP1 citations51