Inventor
NAFUS KATHLEEN
BE7 patents
Patents
7 patentsUS7673278B2Mar 2, 2010
Enhanced process yield using a hot-spot library
TOKYO ELECTRON LTD26 citations91
US7070915B2Jul 4, 2006
Method and system for drying a substrate
TOKYO ELECTRON LTD81 citations91
US10490402B2Nov 26, 2019
UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly
TOKYO ELECTRON LTD2 citations68
US9418834B2Aug 16, 2016
System and methods for spin-on coating of self-assembled monolayers or periodic organosilicates on a substrate
TOKYO ELECTRON LTD5 citations66
US11538684B2Dec 27, 2022
UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly
TOKYO ELECTRON LTD0 citations58
US10438806B2Oct 8, 2019
Methods and system of using organosilicates as patterning films
TOKYO ELECTRON LTD0 citations48
US7582414B2Sep 1, 2009
Method and system for drying a substrate
TOKYO ELECTRON LTD0 citations46