Inventor

BORST CHRISTOPHER LYLE

US2 patents

Patents

2 patents

US6693357B1Feb 17, 2004

Methods and semiconductor devices with wiring layer fill structures to improve planarization uniformity

TEXAS INSTRUMENTS INC38 citations89

US7268073B2Sep 11, 2007

Post-polish treatment for inhibiting copper corrosion

TEXAS INSTRUMENTS INC9 citations71