Inventor
FEIERABEND PATRICK EDWARD
US4 patents
Patents
4 patentsUS6812061B1Nov 2, 2004
Method and apparatus for assembling an array of micro-devices
INNOVATIVE MICRO TECHNOLOGY14 citations89
US6831380B2Dec 14, 2004
Low inertia latching microactuator
INNOVATIVE MICRO TECHNOLOGY14 citations76
US7057245B2Jun 6, 2006
Method and apparatus for assembling an array of micro-devices
INNOVATIVE MICRO TECHNOLOGY10 citations70
US6593749B2Jul 15, 2003
Wafer level method for probing micromechanical devices
INNOVATIVE MICRO TECHNOLOGY10 citations67