Inventor
GUJER RUDOLF
US6 patents
⚠️ This page may combine multiple inventors who share the name “GUJER RUDOLF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6958098B2Oct 25, 2005
Semiconductor wafer support lift-pin assembly
APPLIED MATERIALS INC18 citations91
US6572708B2Jun 3, 2003
Semiconductor wafer support lift-pin assembly
APPLIED MATERIALS INC27 citations91
US7722737B2May 25, 2010
Gas distribution system for improved transient phase deposition
APPLIED MATERIALS INC23 citations90
US6192829B1Feb 27, 2001
Antenna coil assemblies for substrate processing chambers
APPLIED MATERIALS INC26 citations89
US6776875B2Aug 17, 2004
Semiconductor substrate support assembly having lobed o-rings therein
APPLIED MATERIALS INC3 citations61