Inventor
CHO THOMAS K
US7 patents
Patents
7 patentsUS6517634B2Feb 11, 2003
Chemical vapor deposition chamber lid assembly
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US6363624B1Apr 2, 2002
Apparatus for cleaning a semiconductor process chamber
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US6958098B2Oct 25, 2005
Semiconductor wafer support lift-pin assembly
APPLIED MATERIALS INC18 citations91
US6572708B2Jun 3, 2003
Semiconductor wafer support lift-pin assembly
APPLIED MATERIALS INC27 citations91
US6656286B2Dec 2, 2003
Pedestal with a thermally controlled platen
APPLIED MATERIALS INC6 citations73
US6214121B1Apr 10, 2001
Pedestal with a thermally controlled platen
APPLIED MATERIALS INC13 citations73
US6776875B2Aug 17, 2004
Semiconductor substrate support assembly having lobed o-rings therein
APPLIED MATERIALS INC3 citations61