Inventor
BOONMAN MARCUS EMILE JOANNES
NL7 patents
Patents
7 patentsUS6741331B2May 25, 2004
Lithographic apparatus with improved exposure area focus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV72 citations97
US7113256B2Sep 26, 2006
Lithographic apparatus and device manufacturing method with feed-forward focus control
ASML NETHERLANDS BV35 citations91
US6924884B2Aug 2, 2005
Off-axis leveling in lithographic projection apparatus
ASML NETHERLANDS BV23 citations86
US7564536B2Jul 21, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations72
US7113257B2Sep 26, 2006
Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus
ASML NETHERLANDS BV9 citations70
US7649635B2Jan 19, 2010
Method for determining a map, device manufacturing method, and lithographic apparatus
ASML NETHERLANDS BV2 citations55
US7292351B2Nov 6, 2007
Method for determining a map, device manufacturing method, and lithographic apparatus
ASML NETHERLANDS BV4 citations54