Inventor
WOOD ERIC R
US9 patents
⚠️ This page may combine multiple inventors who share the name “WOOD ERIC R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
8 patentsUS7108753B2Sep 19, 2006
Staggered ribs on process chamber to reduce thermal effects
ASM INC392 citations98
US6183183B1Feb 6, 2001
Dual arm linear hand-off wafer transfer assembly
ASM INC54 citations96
US6585478B1Jul 1, 2003
Semiconductor handling robot with improved paddle-type end effector
ASM INC18 citations92
US6435809B2Aug 20, 2002
Dual arm linear hand-off wafer transfer assembly
ASM INC17 citations92
US7169234B2Jan 30, 2007
Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder
ASM INC27 citations88
US6435799B2Aug 20, 2002
Wafer transfer arm stop
ASM INC13 citations82
US7168911B1Jan 30, 2007
Semiconductor handling robot with improved paddle-type end effector
ASM INC5 citations62
US7169233B2Jan 30, 2007
Reactor chamber
ASM INC6 citations61