Inventor

WOODS CARL A

US5 patents

⚠️ This page may combine multiple inventors who share the name “WOODS CARL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

4 patents

US7000622B2Feb 21, 2006

Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus

LAM RES CORP50 citations94

US7192488B2Mar 20, 2007

Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus

LAM RES CORP3 citations61

US7811423B2Oct 12, 2010

Proximity processing using controlled batch volume with an integrated proximity head

LAM RES CORP2 citations60

US7780825B2Aug 24, 2010

Substrate gripper with integrated electrical contacts

LAM RES CORP0 citations50

WOODS CARL A

1 patent

US8221608B2Jul 17, 2012

Proximity processing using controlled batch volume with an integrated proximity head

WOODS CARL A0 citations42