Inventor
VOGT FRANZ STEFAN
US3 patents
Patents
3 patentsUS7331714B2Feb 19, 2008
Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument
UCHICAGO ARGONNE LLC11 citations77
US10393242B2Aug 27, 2019
Method and apparatus for implementing ultra-high stability long-vertical travel stage
UCHICAGO ARGONNE LLC3 citations68
US9613729B2Apr 4, 2017
Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale
UCHICAGO ARGONNE LLC2 citations66