Inventor
RAVENSBERGEN MARIUS
NL10 patents
⚠️ This page may combine multiple inventors who share the name “RAVENSBERGEN MARIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7436484B2Oct 14, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations92
US7525640B2Apr 28, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV37 citations88
US6819400B2Nov 16, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations71
US8052289B2Nov 8, 2011
Mirror array for lithography
ASML NETHERLANDS BV4 citations61
US7999914B2Aug 16, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations60
US7800079B2Sep 21, 2010
Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method
ASML NETHERLANDS BV0 citations49
US7375353B2May 20, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations39
US7423721B2Sep 9, 2008
Lithographic apparatus
ASML NETHERLANDS BV0 citations36