Inventor
LIVESEY ROBERT GORDON
GB7 patents
Patents
7 patentsUS7359031B2Apr 15, 2008
Lithographic projection assembly, load lock and method for transferring objects
ASML NETHERLANDS BV12 citations80
US7878755B2Feb 1, 2011
Load lock and method for transferring objects
ASML NETHERLANDS BV8 citations79
US7684012B2Mar 23, 2010
Lithographic device, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV2 citations62
US7502095B2Mar 10, 2009
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations61
US7256863B2Aug 14, 2007
Sealing assembly, a lithographic projection apparatus, and a device manufacturing method
ASML NETHERLANDS BV2 citations60
US7576831B2Aug 18, 2009
Method and apparatus for maintaining a machine part
ASML NETHERLANDS BV2 citations58
US7423721B2Sep 9, 2008
Lithographic apparatus
ASML NETHERLANDS BV0 citations36