Inventor
CAO HEIDI
US5 patents
Patents
5 patentsUS7005227B2Feb 28, 2006
One component EUV photoresist
INTEL CORP471 citations97
US7374867B2May 20, 2008
Enhancing photoresist performance using electric fields
INTEL CORP21 citations90
US7459260B2Dec 2, 2008
Method of reducing sensitivity of EUV photoresists to out-of-band radiation and EUV photoresists formed according to the method
INTEL CORP9 citations83
US7442487B2Oct 28, 2008
Low outgassing and non-crosslinking series of polymers for EUV negative tone photoresists
INTEL CORP0 citations51
US7427463B2Sep 23, 2008
Photoresists with reduced outgassing for extreme ultraviolet lithography
INTEL CORP0 citations50