Inventor
LEE JUNG-SEOCK
KR7 patents
Patents
7 patentsUS7709369B2May 4, 2010
Method for forming a roughened contact in a semiconductor device
HYNIX SEMICONDUCTOR INC11 citations82
US7986049B2Jul 26, 2011
Semiconductor device having multiple-layer hard mask with opposite stresses and method for fabricating the same
HYNIX SEMICONDUCTOR INC4 citations60
US7732335B2Jun 8, 2010
Method for forming pattern in semiconductor device
HYNIX SEMICONDUCTOR INC2 citations60
US7629242B2Dec 8, 2009
Method for fabricating semiconductor device having recess gate
HYNIX SEMICONDUCTOR INC4 citations60
US7781347B2Aug 24, 2010
Semiconductor device having multiple-layer hard mask with opposite stresses and method for fabricating the same
HYNIX SEMICONDUCTOR INC0 citations50
US7678535B2Mar 16, 2010
Method for fabricating semiconductor device with recess gate
HYNIX SEMICONDUCTOR INC0 citations50
US7608536B2Oct 27, 2009
Method of manufacturing contact opening
HYNIX SEMICONDUCTOR INC0 citations41