Inventor
TINNEMANS PATRICIUS ALOYSIUS JACOBUS
NL92 patents
⚠️ This page may combine multiple inventors who share the name “TINNEMANS PATRICIUS ALOYSIUS JACOBUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
42 patentsUS7779781B2Aug 24, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV45 citations96
US9778025B2Oct 3, 2017
Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV21 citations94
US7868998B2Jan 11, 2011
Lithographic apparatus
ASML NETHERLANDS BV9 citations92
US7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US11067902B2Jul 20, 2021
Computational metrology
ASML NETHERLANDS BV9 citations85
US11125806B2Sep 21, 2021
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV5 citations84
US10816909B2Oct 27, 2020
Metrology system and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV5 citations84
US10527955B2Jan 7, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9846368B2Dec 19, 2017
Lithographic apparatus and device manufacturing method utilizing data filtering
ASML NETHERLANDS BV9 citations84
US9436097B2Sep 6, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US7936445B2May 3, 2011
Altering pattern data based on measured optical element characteristics
ASML NETHERLANDS BV11 citations83
US10527958B2Jan 7, 2020
Lithographic method
ASML NETHERLANDS BV7 citations81
US7965373B2Jun 21, 2011
Lithographic apparatus and device manufacturing method utilizing a datapath having a balanced calculation load
ASML NETHERLANDS BV11 citations80
US7830493B2Nov 9, 2010
System and method for compensating for radiation induced thermal distortions in a substrate or projection system
ASML NETHERLANDS BV10 citations79
US7486384B2Feb 3, 2009
Lithographic support structure
ASML NETHERLANDS BV11 citations77
US7864295B2Jan 4, 2011
Lithographic apparatus and device manufacturing method utilizing data filtering
ASML NETHERLANDS BV4 citations74
US12066764B2Aug 20, 2024
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV2 citations73
US11415900B2Aug 16, 2022
Metrology system and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV1 citations73
US10248033B2Apr 2, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US10241426B2Mar 26, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations73
US10133192B2Nov 20, 2018
Method and apparatus for determining the property of a structure, device manufacturing method
ASML NETHERLANDS BV6 citations73
US9939742B2Apr 10, 2018
Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations73
US9927726B2Mar 27, 2018
Polarization independent interferometer
ASML NETHERLANDS BV3 citations73
US9547241B2Jan 17, 2017
Alignment sensor, lithographic apparatus and alignment method
ASML NETHERLANDS BV5 citations73
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US11009343B2May 18, 2021
Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US10132763B2Nov 20, 2018
Inspection method and apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations72
US9940703B2Apr 10, 2018
Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV4 citations72
US9633427B2Apr 25, 2017
Method of measuring a property of a target structure, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations72
US12032299B2Jul 9, 2024
Metrology method and associated metrology and lithographic apparatuses
ASML NETHERLANDS BV2 citations71
US10474045B2Nov 12, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US11029610B2Jun 8, 2021
Lithographic method
ASML NETHERLANDS BV2 citations70
US10962887B2Mar 30, 2021
Lithographic method
ASML NETHERLANDS BV1 citations70
US10901326B2Jan 26, 2021
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV1 citations70
US10620549B2Apr 14, 2020
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV3 citations70
US10585363B2Mar 10, 2020
Alignment system
ASML NETHERLANDS BV4 citations70
US10331040B2Jun 25, 2019
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV4 citations70
US10466601B2Nov 5, 2019
Alignment sensor for lithographic apparatus
ASML NETHERLANDS BV5 citations68
US7751032B2Jul 6, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations63
US12461451B2Nov 4, 2025
Computational metrology
ASML NETHERLANDS BV0 citations62
US12366811B2Jul 22, 2025
Metrology system and method for determining a characteristic of one or more structures on a substrate
ASML NETHERLANDS BV0 citations62
TINNEMANS PATRICIUS ALOYSIUS JACOBUS
2 patentsCADEE THEODORUS PETRUS MARIA
2 patentsMERTENS JEROEN JOHANNES SOPHIA MARIA
2 patentsJANSEN HANS
1 patentHOOGENDAM CHRISTIAAN ALEXANDER
1 patentShowing the top 50 of 92 patents by PatentIndex Score.