Inventor
RAMANUJAM RAJESH S
US5 patents
⚠️ This page may combine multiple inventors who share the name “RAMANUJAM RAJESH S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7112763B2Sep 26, 2006
Method and apparatus for low temperature pyrometry useful for thermally processing silicon wafers
APPLIED MATERIALS INC69 citations94
US7860379B2Dec 28, 2010
Temperature measurement and control of wafer support in thermal processing chamber
APPLIED MATERIALS INC27 citations92
US7804042B2Sep 28, 2010
Pryometer for laser annealing system compatible with amorphous carbon optical absorber layer
APPLIED MATERIALS INC3 citations62