Inventor
HULSEBOS EDO MARIA
NL22 patents
⚠️ This page may combine multiple inventors who share the name “HULSEBOS EDO MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
20 patentsUS10527958B2Jan 7, 2020
Lithographic method
ASML NETHERLANDS BV7 citations81
US11079684B2Aug 3, 2021
Measurement apparatus and a method for determining a substrate grid
ASML NETHERLANDS BV3 citations73
US9665012B2May 30, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations72
US11994845B2May 28, 2024
Determining a correction to a process
ASML NETHERLANDS BV2 citations71
US10474045B2Nov 12, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US11029610B2Jun 8, 2021
Lithographic method
ASML NETHERLANDS BV2 citations70
US10962887B2Mar 30, 2021
Lithographic method
ASML NETHERLANDS BV1 citations70
US10901326B2Jan 26, 2021
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV1 citations70
US10620549B2Apr 14, 2020
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV3 citations70
US10331040B2Jun 25, 2019
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV4 citations70
US12287583B2Apr 29, 2025
Method for modeling measurement data over a substrate area and associated apparatuses
ASML NETHERLANDS BV0 citations62
US11966166B2Apr 23, 2024
Measurement apparatus and a method for determining a substrate grid
ASML NETHERLANDS BV1 citations62
US11181836B2Nov 23, 2021
Method for determining deformation
ASML NETHERLANDS BV0 citations62
US12493285B2Dec 9, 2025
Determining a correction to a process
ASML NETHERLANDS BV0 citations60
US11086305B2Aug 10, 2021
Determining a correction to a process
ASML NETHERLANDS BV0 citations60
US12032305B2Jul 9, 2024
Alignment method and associated alignment and lithographic apparatuses
ASML NETHERLANDS BV0 citations51
US11927892B2Mar 12, 2024
Alignment method and associated alignment and lithographic apparatuses
ASML NETHERLANDS BV0 citations51
US10514620B2Dec 24, 2019
Alignment method
ASML NETHERLANDS BV0 citations48
US10139740B2Nov 27, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations41
US10527957B2Jan 7, 2020
Method and apparatus for processing a substrate in a lithographic apparatus
ASML NETHERLANDS BV0 citations35