Inventor
MEGENS HENRICUS JOHANNES LAMBERTUS
NL16 patents
⚠️ This page may combine multiple inventors who share the name “MEGENS HENRICUS JOHANNES LAMBERTUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS8994944B2Mar 31, 2015
Methods and scatterometers, lithographic systems, and lithographic processing cells
ASML NETHERLANDS BV24 citations92
US10527958B2Jan 7, 2020
Lithographic method
ASML NETHERLANDS BV7 citations81
US11079684B2Aug 3, 2021
Measurement apparatus and a method for determining a substrate grid
ASML NETHERLANDS BV3 citations73
US10180628B2Jan 15, 2019
Method of determining critical-dimension-related properties, inspection apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations73
US12032299B2Jul 9, 2024
Metrology method and associated metrology and lithographic apparatuses
ASML NETHERLANDS BV2 citations71
US11029610B2Jun 8, 2021
Lithographic method
ASML NETHERLANDS BV2 citations70
US10962887B2Mar 30, 2021
Lithographic method
ASML NETHERLANDS BV1 citations70
US11966166B2Apr 23, 2024
Measurement apparatus and a method for determining a substrate grid
ASML NETHERLANDS BV1 citations62
US11016397B2May 25, 2021
Source separation from metrology data
ASML NETHERLANDS BV0 citations62
US9518936B2Dec 13, 2016
Method and apparatus for determining lithographic quality of a structure
ASML NETHERLANDS BV2 citations58
CRAMER HUGO AUGUSTINUS JOSEPH
2 patentsUS9081303B2Jul 14, 2015
Methods and scatterometers, lithographic systems, and lithographic processing cells
CRAMER HUGO AUGUSTINUS JOSEPH73 citations96
US8390823B2Mar 5, 2013
Method, inspection apparatus and substrate for determining an approximate structure of an object on a substrate
CRAMER HUGO AUGUSTINUS JOSEPH2 citations62