Inventor
RAGHUNATHAN SUDHARSHANAN
US13 patents
⚠️ This page may combine multiple inventors who share the name “RAGHUNATHAN SUDHARSHANAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
9 patentsUS9362165B1Jun 7, 2016
2D self-aligned via first process flow
GLOBALFOUNDRIES INC49 citations94
US9818651B2Nov 14, 2017
Methods, apparatus and system for a passthrough-based architecture
GLOBALFOUNDRIES INC15 citations91
US9425097B1Aug 23, 2016
Cut first alternative for 2D self-aligned via
GLOBALFOUNDRIES INC12 citations84
US10236350B2Mar 19, 2019
Method, apparatus and system for a high density middle of line flow
GLOBALFOUNDRIES INC3 citations68
US10559503B2Feb 11, 2020
Methods, apparatus and system for a passthrough-based architecture
GLOBALFOUNDRIES INC1 citations61
US9478506B2Oct 25, 2016
Multilayer pattern transfer for chemical guides
GLOBALFOUNDRIES INC2 citations61
US8956789B2Feb 17, 2015
Methods for fabricating integrated circuits including multi-patterning of masks for extreme ultraviolet lithography
GLOBALFOUNDRIES INC2 citations61
US9852984B2Dec 26, 2017
Cut first alternative for 2D self-aligned via
GLOBALFOUNDRIES INC0 citations52
US8911920B2Dec 16, 2014
Methods for fabricating EUV masks and methods for fabricating integrated circuits using such EUV masks
GLOBALFOUNDRIES INC0 citations40