Inventor
MENCHTCHIKOV BORIS
US35 patents
⚠️ This page may combine multiple inventors who share the name “MENCHTCHIKOV BORIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
25 patentsUS7304715B2Dec 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV52 citations94
US7804575B2Sep 28, 2010
Lithographic apparatus and device manufacturing method having liquid evaporation control
ASML NETHERLANDS BV23 citations92
US7250237B2Jul 31, 2007
Optimized correction of wafer thermal deformations in a lithographic process
ASML NETHERLANDS BV19 citations90
US7462429B2Dec 9, 2008
Method and arrangement for correcting thermally-induced field deformations of a lithographically exposed substrate
ASML NETHERLANDS BV9 citations84
US9903823B2Feb 27, 2018
Metrology method and apparatus
ASML NETHERLANDS BV10 citations83
US7196768B2Mar 27, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations83
US7453063B2Nov 18, 2008
Calibration substrate and method for calibrating a lithographic apparatus
ASML NETHERLANDS BV16 citations82
US10527958B2Jan 7, 2020
Lithographic method
ASML NETHERLANDS BV7 citations81
US7710539B2May 4, 2010
Method and arrangement for predicting thermally-induced deformation of a substrate, and a semiconductor device
ASML NETHERLANDS BV5 citations73
US7462430B2Dec 9, 2008
Method and arrangement for predicting thermally-induced deformation of a substrate, and a semiconductor device
ASML NETHERLANDS BV4 citations73
US12044980B2Jul 23, 2024
Method of manufacturing devices
ASML NETHERLANDS BV3 citations72
US11378893B2Jul 5, 2022
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV2 citations72
US10838310B2Nov 17, 2020
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV1 citations72
US7595496B2Sep 29, 2009
Optimized correction of wafer thermal deformations in a lithographic process
ASML NETHERLANDS BV7 citations72
US12055904B2Aug 6, 2024
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV2 citations71
US11803127B2Oct 31, 2023
Method for determining root cause affecting yield in a semiconductor manufacturing process
ASML NETHERLANDS BV3 citations71
US11947266B2Apr 2, 2024
Method for controlling a manufacturing process and associated apparatuses
ASML NETHERLANDS BV5 citations70
US10962887B2Mar 30, 2021
Lithographic method
ASML NETHERLANDS BV1 citations70
US7710538B2May 4, 2010
Method and arrangement for correcting thermally-induced field deformations of a lithographically exposed substrate
ASML NETHERLANDS BV2 citations62
US7426011B2Sep 16, 2008
Method of calibrating a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7423725B2Sep 9, 2008
Lithographic method
ASML NETHERLANDS BV5 citations60
US11714357B2Aug 1, 2023
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV0 citations59
US11086229B2Aug 10, 2021
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV1 citations59
US9395633B2Jul 19, 2016
Lithographic cluster system, method for calibrating a positioning device of a lithographic apparatus
ASML NETHERLANDS BV2 citations55
US10254663B2Apr 9, 2019
Lithographic apparatus and device manufacturing method involving a heater
ASML NETHERLANDS BV0 citations51
PADIY ALEXANDER VIKTOROVYCH
4 patentsUS8687167B2Apr 1, 2014
Lithographic apparatus and device manufacturing method
PADIY ALEXANDER VIKTOROVYCH7 citations82
US8947630B2Feb 3, 2015
Lithographic apparatus and device manufacturing method
PADIY ALEXANDER VIKTOROVYCH6 citations71
US8947643B2Feb 3, 2015
Lithographic apparatus and method controlling parameter drift by performing multiple patterning passes on reference substrate
PADIY ALEXANDER VIKTOROVYCH3 citations60
US9134625B2Sep 15, 2015
Lithographic apparatus and device manufacturing method for measuring wafer parameters using non-standard alignment settings
PADIY ALEXANDER VIKTOROVYCH1 citations50
MENCHTCHIKOV BORIS
4 patentsUS9310698B2Apr 12, 2016
Method and apparatus for controlling a lithographic apparatus
MENCHTCHIKOV BORIS6 citations71
US8717536B2May 6, 2014
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
MENCHTCHIKOV BORIS5 citations71
US9069240B2Jun 30, 2015
Calibration of lithographic apparatus by exposing patterns on substrate positioned at different orientations
MENCHTCHIKOV BORIS0 citations50
US8793099B2Jul 29, 2014
Calibration of lithographic apparatus
MENCHTCHIKOV BORIS1 citations50