Inventor

TACHI NORIYUKI

JP2 patents

Patents

2 patents

US8267745B2Sep 18, 2012

Methods of grinding semiconductor wafers having improved nanotopology

BHAGAVAT MILIND S3 citations59

US8066553B2Nov 29, 2011

Wafer clamping device for a double side grinder

BHAGAVAT MILIND S2 citations59