Inventor
VERHEES LOEK JOHANNES PETRUS
NL7 patents
Patents
7 patentsUS10527958B2Jan 7, 2020
Lithographic method
ASML NETHERLANDS BV7 citations81
US10474045B2Nov 12, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US11029610B2Jun 8, 2021
Lithographic method
ASML NETHERLANDS BV2 citations70
US10962887B2Mar 30, 2021
Lithographic method
ASML NETHERLANDS BV1 citations70
US10901326B2Jan 26, 2021
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV1 citations70
US10620549B2Apr 14, 2020
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV3 citations70
US10331040B2Jun 25, 2019
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV4 citations70