Inventor
ROELOFS WILLEM SEINE CHRISTIAN
NL10 patents
Patents
10 patentsUS10527958B2Jan 7, 2020
Lithographic method
ASML NETHERLANDS BV7 citations81
US11774862B2Oct 3, 2023
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV4 citations72
US11175591B2Nov 16, 2021
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV2 citations70
US11029610B2Jun 8, 2021
Lithographic method
ASML NETHERLANDS BV2 citations70
US10962887B2Mar 30, 2021
Lithographic method
ASML NETHERLANDS BV1 citations70
US10877381B2Dec 29, 2020
Methods of determining corrections for a patterning process
ASML NETHERLANDS BV1 citations70
US11126093B2Sep 21, 2021
Focus and overlay improvement by modifying a patterning device
ASML NETHERLANDS BV0 citations62
US11782349B2Oct 10, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11592753B2Feb 28, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11327407B2May 10, 2022
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59