Inventor
YAGUBIZADE HADI
NL8 patents
Patents
8 patentsUS10527958B2Jan 7, 2020
Lithographic method
ASML NETHERLANDS BV7 citations81
US11300886B2Apr 12, 2022
Method of adapting feed-forward parameters
ASML NETHERLANDS BV2 citations70
US11029610B2Jun 8, 2021
Lithographic method
ASML NETHERLANDS BV2 citations70
US10962887B2Mar 30, 2021
Lithographic method
ASML NETHERLANDS BV1 citations70
US12306545B2May 20, 2025
Determining lithographic matching performance
ASML NETHERLANDS BV0 citations59
US11809088B2Nov 7, 2023
Method for controlling a lithographic apparatus
ASML NETHERLANDS BV0 citations58
US11061336B2Jul 13, 2021
Device manufacturing method
ASML NETHERLANDS BV1 citations58
US11669017B2Jun 6, 2023
Method for controlling a manufacturing apparatus and associated apparatuses
ASML NETHERLANDS BV1 citations57