Inventor
CEKLI HAKKI ERGÜN
SG30 patents
Patents
30 patentsUS10527958B2Jan 7, 2020
Lithographic method
ASML NETHERLANDS BV7 citations81
US11774862B2Oct 3, 2023
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV4 citations72
US10025193B2Jul 17, 2018
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
ASML NETHERLANDS BV3 citations72
US11803127B2Oct 31, 2023
Method for determining root cause affecting yield in a semiconductor manufacturing process
ASML NETHERLANDS BV3 citations71
US10474045B2Nov 12, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US11392044B2Jul 19, 2022
Method of determining a position of a feature
ASML NETHERLANDS BV2 citations70
US11300886B2Apr 12, 2022
Method of adapting feed-forward parameters
ASML NETHERLANDS BV2 citations70
US11175591B2Nov 16, 2021
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
ASML NETHERLANDS BV2 citations70
US11029610B2Jun 8, 2021
Lithographic method
ASML NETHERLANDS BV2 citations70
US10962887B2Mar 30, 2021
Lithographic method
ASML NETHERLANDS BV1 citations70
US10877381B2Dec 29, 2020
Methods of determining corrections for a patterning process
ASML NETHERLANDS BV1 citations70
US10578980B2Mar 3, 2020
Method of determining a position of a feature
ASML NETHERLANDS BV2 citations70
US9879988B2Jan 30, 2018
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV4 citations70
US10394139B2Aug 27, 2019
Patterning device cooling apparatus
ASML NETHERLANDS BV2 citations68
US11493851B2Nov 8, 2022
Lithographic method and lithographic apparatus
ASML NETHERLANDS BV0 citations62
US11156923B2Oct 26, 2021
Lithographic method and lithographic apparatus
ASML NETHERLANDS BV1 citations62
US11036146B2Jun 15, 2021
Method and apparatus to reduce effects of nonlinear behavior
ASML NETHERLANDS BV0 citations62
US11181829B2Nov 23, 2021
Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations61
US12078935B2Sep 3, 2024
Device manufacturing methods
ASML NETHERLANDS BV0 citations60
US12045555B2Jul 23, 2024
Method to label substrates based on process parameters
ASML NETHERLANDS BV0 citations60
US11442366B2Sep 13, 2022
Device manufacturing methods
ASML NETHERLANDS BV0 citations60
US10495986B2Dec 3, 2019
Patterning device cooling system and method of thermally conditioning a patterning device
ASML NETHERLANDS BV1 citations60
US11782349B2Oct 10, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11714357B2Aug 1, 2023
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV0 citations59
US11592753B2Feb 28, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11327407B2May 10, 2022
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11086229B2Aug 10, 2021
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV1 citations59
US11036148B2Jun 15, 2021
Patterning device cooling system and method of thermally conditioning a patterning device
ASML NETHERLANDS BV0 citations59
US11099485B2Aug 24, 2021
Maintaining a set of process fingerprints
ASML NETHERLANDS BV0 citations57
US10642166B2May 5, 2020
Patterning device cooling apparatus
ASML NETHERLANDS BV0 citations48