Inventor
BRINKHOF RALPH
NL20 patents
⚠️ This page may combine multiple inventors who share the name “BRINKHOF RALPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
17 patentsUS10527958B2Jan 7, 2020
Lithographic method
ASML NETHERLANDS BV7 citations81
US7239368B2Jul 3, 2007
Using unflatness information of the substrate table or mask table for decreasing overlay
ASML NETHERLANDS BV10 citations81
US12032299B2Jul 9, 2024
Metrology method and associated metrology and lithographic apparatuses
ASML NETHERLANDS BV2 citations71
US11029610B2Jun 8, 2021
Lithographic method
ASML NETHERLANDS BV2 citations70
US10962887B2Mar 30, 2021
Lithographic method
ASML NETHERLANDS BV1 citations70
US10901326B2Jan 26, 2021
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV1 citations70
US10620549B2Apr 14, 2020
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV3 citations70
US10331040B2Jun 25, 2019
Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV4 citations70
US7113257B2Sep 26, 2006
Assembly comprising a sensor for determining at least one of tilt and height of a substrate, a method therefor and a lithographic projection apparatus
ASML NETHERLANDS BV9 citations70
US10416577B2Sep 17, 2019
Position measuring method of an alignment target
ASML NETHERLANDS BV3 citations69
US7746484B2Jun 29, 2010
Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
ASML NETHERLANDS BV7 citations68
US11442372B2Sep 13, 2022
Method of measuring an alignment mark or an alignment mark assembly, alignment system, and lithographic tool
ASML NETHERLANDS BV0 citations62
US7889357B2Feb 15, 2011
Method for positioning a target portion of a substrate with respect to a focal plane of a projection system
ASML NETHERLANDS BV2 citations57
US7649635B2Jan 19, 2010
Method for determining a map, device manufacturing method, and lithographic apparatus
ASML NETHERLANDS BV2 citations55
US7292351B2Nov 6, 2007
Method for determining a map, device manufacturing method, and lithographic apparatus
ASML NETHERLANDS BV4 citations54
US12189314B2Jan 7, 2025
Metrology method and associated metrology and lithographic apparatuses
ASML NETHERLANDS BV0 citations49
US12276919B2Apr 15, 2025
Method for controlling a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations44