Inventor

VU TRAN THANH THUY

NL3 patents

Patents

3 patents

US10527958B2Jan 7, 2020

Lithographic method

ASML NETHERLANDS BV7 citations81

US11029610B2Jun 8, 2021

Lithographic method

ASML NETHERLANDS BV2 citations70

US10962887B2Mar 30, 2021

Lithographic method

ASML NETHERLANDS BV1 citations70