Inventor
GOOSEN MAIKEL ROBERT
NL13 patents
Patents
13 patentsUS10527958B2Jan 7, 2020
Lithographic method
ASML NETHERLANDS BV7 citations81
US10474039B2Nov 12, 2019
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV2 citations73
US11029610B2Jun 8, 2021
Lithographic method
ASML NETHERLANDS BV2 citations70
US10962887B2Mar 30, 2021
Lithographic method
ASML NETHERLANDS BV1 citations70
US10416577B2Sep 17, 2019
Position measuring method of an alignment target
ASML NETHERLANDS BV3 citations69
US12230469B2Feb 18, 2025
Apparatus for and method of local control of a charged particle beam
ASML NETHERLANDS BV0 citations60
US12165836B2Dec 10, 2024
Systems and methods of profiling charged-particle beams
ASML NETHERLANDS BV0 citations60
US11942302B2Mar 26, 2024
Pulsed charged-particle beam system
ASML NETHERLANDS BV0 citations59
US11881374B2Jan 23, 2024
Apparatus for and method of controlling an energy spread of a charged-particle beam
ASML NETHERLANDS BV0 citations59
US11961700B2Apr 16, 2024
Systems and methods for image enhancement for a multi-beam charged-particle inspection system
ASML NETHERLANDS BV0 citations57
US10942460B2Mar 9, 2021
Mark position determination method
ASML NETHERLANDS BV0 citations51
US11791132B2Oct 17, 2023
Aperture array with integrated current measurement
ASML NETHERLANDS BV0 citations49
US12183540B2Dec 31, 2024
Systems and methods of determining aberrations in images obtained by a charged-particle beam tool
ASML NETHERLANDS BV0 citations41