Inventor

SHEN HSUEH CHI

TW5 patents

⚠️ This page may combine multiple inventors who share the name “SHEN HSUEH CHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

4 patents

US6980873B2Dec 27, 2005

System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environment

TAIWAN SEMICONDUCTOR MFG69 citations94

US7751908B2Jul 6, 2010

Method and system for thermal process control

TAIWAN SEMICONDUCTOR MFG8 citations78

US7534725B2May 19, 2009

Advanced process control for semiconductor processing

TAIWAN SEMICONDUCTOR MFG7 citations72

US7437404B2Oct 14, 2008

System and method for improving equipment communication in semiconductor manufacturing equipment

TAIWAN SEMICONDUCTOR MFG4 citations59

SHEN HSUEH CHI

1 patent

US8417362B2Apr 9, 2013

Advanced process control for semiconductor processing

SHEN HSUEH CHI2 citations55