Inventor
KOU WEITIAN
NL12 patents
Patents
12 patentsUS10527958B2Jan 7, 2020
Lithographic method
ASML NETHERLANDS BV7 citations81
US11054813B2Jul 6, 2021
Method and apparatus for controlling an industrial process using product grouping
ASML NETHERLANDS BV2 citations72
US11029610B2Jun 8, 2021
Lithographic method
ASML NETHERLANDS BV2 citations70
US10962887B2Mar 30, 2021
Lithographic method
ASML NETHERLANDS BV1 citations70
US10877381B2Dec 29, 2020
Methods of determining corrections for a patterning process
ASML NETHERLANDS BV1 citations70
US11448973B2Sep 20, 2022
Computational metrology based correction and control
ASML NETHERLANDS BV2 citations68
US12124179B2Oct 22, 2024
Method of wafer alignment using at resolution metrology on product features
ASML NETHERLANDS BV0 citations61
US12044981B2Jul 23, 2024
Method and apparatus for optimization of lithographic process
ASML NETHERLANDS BV1 citations60
US11099487B2Aug 24, 2021
Method and apparatus for optimization of lithographic process
ASML NETHERLANDS BV0 citations60
US11782349B2Oct 10, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11592753B2Feb 28, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11327407B2May 10, 2022
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59