Inventor

RIJPSTRA MANOUK

NL5 patents

Patents

5 patents

US10527958B2Jan 7, 2020

Lithographic method

ASML NETHERLANDS BV7 citations81

US11029610B2Jun 8, 2021

Lithographic method

ASML NETHERLANDS BV2 citations70

US10962887B2Mar 30, 2021

Lithographic method

ASML NETHERLANDS BV1 citations70

US11448973B2Sep 20, 2022

Computational metrology based correction and control

ASML NETHERLANDS BV2 citations68

US12189314B2Jan 7, 2025

Metrology method and associated metrology and lithographic apparatuses

ASML NETHERLANDS BV0 citations49