Inventor

BIJNEN FRANCISCUS GODEFRIDUS CASPER

NL41 patents

⚠️ This page may combine multiple inventors who share the name “BIJNEN FRANCISCUS GODEFRIDUS CASPER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BIJNEN FRANCISCUS GODEFRIDUS CASPER

ASML NETHERLANDS BV

Alignment of substrates for bonding

Lithographic method

Method and system for 3D alignment in wafer scale integration

Measurement apparatus and a method for determining a substrate grid

Method and apparatus for controlling an industrial process using product grouping

Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system

Lithographic apparatus and device manufacturing method

Measurement apparatus

Lithographic method

Lithographic method

Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus

Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus

Method of controlling a lithographic apparatus and device manufacturing method, control system for a lithographic apparatus and lithographic apparatus

Target for measuring a parameter of a lithographic process

Measurement apparatus and a method for determining a substrate grid

Method of measuring an alignment mark or an alignment mark assembly, alignment system, and lithographic tool

Method for determining deformation

Substrate table with windows, method of measuring a position of a substrate and a lithographic apparatus

Measurement apparatus

Inspection method and apparatus, substrates for use therein and device manufacturing method

Alignment method and associated alignment and lithographic apparatuses

Alignment method and associated alignment and lithographic apparatuses

Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus

Phase modulators in alignment to decrease mark size

Alignment method

Patterning device, method of producing a marker on a substrate and device manufacturing method

Lithographic apparatus and device manufacturing method

Method and apparatus for processing a substrate in a lithographic apparatus

Methods and apparatus for determining the position of a target structure on a substrate, methods and apparatus for determining the position of a substrate

BIJNEN FRANCISCUS GODEFRIDUS CASPER

Alignment mark and a method of aligning a substrate comprising such an alignment mark

Alignment measurement system, lithographic apparatus, and a method to determine alignment in a lithographic apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method to determine improved absolute position of exposure fields using mark structures

ASML HOLDING NV

Compact alignment sensor arrangements

Measuring method, measurement apparatus, lithographic apparatus and device manufacturing method

Determining position and curvature information directly from a surface of a patterning device

HULSEBOS EDO MARIA

Alignment system and alignment marks for use therewith

Alignment system and alignment marks for use therewith

ASML NETHERLANDS N V

Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus

DECKERS DAVID

Measuring method, apparatus and substrate

WARNAAR PATRICK

Method for coarse wafer alignment in a lithographic apparatus