Inventor
LING MANG-MANG
US13 patents
⚠️ This page may combine multiple inventors who share the name “LING MANG-MANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS8980758B1Mar 17, 2015
Methods for etching an etching stop layer utilizing a cyclical etching process
APPLIED MATERIALS INC192 citations98
US9543163B2Jan 10, 2017
Methods for forming features in a material layer utilizing a combination of a main etching and a cyclical etching process
APPLIED MATERIALS INC114 citations97
US10424487B2Sep 24, 2019
Atomic layer etching processes
APPLIED MATERIALS INC3 citations72
US9059398B2Jun 16, 2015
Methods for etching materials used in MRAM applications
APPLIED MATERIALS INC4 citations71
US11145808B2Oct 12, 2021
Methods for etching a structure for MRAM applications
APPLIED MATERIALS INC0 citations62
US10957548B2Mar 23, 2021
Method of etching copper indium gallium selenide (CIGS) material
APPLIED MATERIALS INC0 citations62
US11776806B2Oct 3, 2023
Multi-step pre-clean for selective metal gap fill
APPLIED MATERIALS INC0 citations61
US11380536B2Jul 5, 2022
Multi-step pre-clean for selective metal gap fill
APPLIED MATERIALS INC1 citations61
US11384428B2Jul 12, 2022
Carbon layer covered mask in 3D applications
APPLIED MATERIALS INC0 citations60
US8932959B2Jan 13, 2015
Method and system for etching plural layers on a workpiece including a lower layer containing an advanced memory material
APPLIED MATERIALS INC1 citations52
US10490406B2Nov 26, 2019
Systems and methods for material breakthrough
APPLIED MATERIALS INC0 citations51
US10354889B2Jul 16, 2019
Non-halogen etching of silicon-containing materials
APPLIED MATERIALS INC0 citations41