Inventor
PENDER JEREMIAH T
US10 patents
⚠️ This page may combine multiple inventors who share the name “PENDER JEREMIAH T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS9543163B2Jan 10, 2017
Methods for forming features in a material layer utilizing a combination of a main etching and a cyclical etching process
APPLIED MATERIALS INC114 citations97
US9093389B2Jul 28, 2015
Method of patterning a silicon nitride dielectric film
APPLIED MATERIALS INC104 citations97
US8802572B2Aug 12, 2014
Method of patterning a low-k dielectric film
APPLIED MATERIALS INC115 citations97
US8748322B1Jun 10, 2014
Silicon oxide recess etch
APPLIED MATERIALS INC125 citations97
US6440864B1Aug 27, 2002
Substrate cleaning process
APPLIED MATERIALS INC119 citations95
US11302519B2Apr 12, 2022
Method of patterning a low-k dielectric film
APPLIED MATERIALS INC1 citations62
US9514953B2Dec 6, 2016
Methods for barrier layer removal
APPLIED MATERIALS INC1 citations52
US8932959B2Jan 13, 2015
Method and system for etching plural layers on a workpiece including a lower layer containing an advanced memory material
APPLIED MATERIALS INC1 citations52