Inventor
BELOSTOTSKIY SERGEY G
US13 patents
⚠️ This page may combine multiple inventors who share the name “BELOSTOTSKIY SERGEY G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS10923367B2Feb 16, 2021
Process chamber for etching low K and other dielectric films
APPLIED MATERIALS INC41 citations98
US9093389B2Jul 28, 2015
Method of patterning a silicon nitride dielectric film
APPLIED MATERIALS INC104 citations97
US8802572B2Aug 12, 2014
Method of patterning a low-k dielectric film
APPLIED MATERIALS INC115 citations97
US8748322B1Jun 10, 2014
Silicon oxide recess etch
APPLIED MATERIALS INC125 citations97
US9666414B2May 30, 2017
Process chamber for etching low k and other dielectric films
APPLIED MATERIALS INC9 citations84
US10096496B2Oct 9, 2018
Process chamber for etching low K and other dielectric films
APPLIED MATERIALS INC1 citations63
US11410860B2Aug 9, 2022
Process chamber for etching low k and other dielectric films
APPLIED MATERIALS INC0 citations62
US11302519B2Apr 12, 2022
Method of patterning a low-k dielectric film
APPLIED MATERIALS INC1 citations62
US8932959B2Jan 13, 2015
Method and system for etching plural layers on a workpiece including a lower layer containing an advanced memory material
APPLIED MATERIALS INC1 citations52
US9601301B2Mar 21, 2017
Non-intrusive measurement of a wafer DC self-bias in semiconductor processing equipment
APPLIED MATERIALS INC1 citations51
US9368370B2Jun 14, 2016
Temperature ramping using gas distribution plate heat
APPLIED MATERIALS INC1 citations51