P

Inventor

HISAI AKIHIRO

JP13 patents
⚠️ This page may combine multiple inventors who share the name “HISAI AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAINIPPON SCREEN MFG

5 patents
US5927077AJul 27, 1999

Processing system hot plate construction substrate

DAINIPPON SCREEN MFG58 citations96
US7017658B2Mar 28, 2006

Heat processing device

DAINIPPON SCREEN MFG26 citations92
US5514215AMay 7, 1996

Treating liquid supplying apparatus for a substrate spin treating apparatus

DAINIPPON SCREEN MFG24 citations89
US6736206B2May 18, 2004

Thermal processor

DAINIPPON SCREEN MFG16 citations83
US6913781B2Jul 5, 2005

Substrate processing apparatus and method including a device for applying a coating and a device for measuring the film quality of the coating

DAINIPPON SCREEN MFG7 citations73

SOKUDO CO LTD

2 patents
US8034190B2Oct 11, 2011

Substrate processing apparatus and substrate processing method

SOKUDO CO LTD22 citations91
US7726891B2Jun 1, 2010

Substrate processing apparatus and substrate processing method

SOKUDO CO LTD2 citations62

HARUMOTO MASAHIKO

2 patents
US8956695B2Feb 17, 2015

Developing method

HARUMOTO MASAHIKO2 citations61
US8137576B2Mar 20, 2012

Substrate developing method and developing apparatus

HARUMOTO MASAHIKO2 citations61

SMC CORP

1 patent
US6080969AJun 27, 2000

Apparatus for and method of thermally processing substrate

SMC CORP70 citations95

KANEYAMA KOJI

1 patent
US8496761B2Jul 30, 2013

Substrate processing apparatus and substrate processing method

KANEYAMA KOJI5 citations72

SCREEN SEMICONDUCTOR SOLUTIONS CO LTD

1 patent
US9581907B2Feb 28, 2017

Developing apparatus

SCREEN SEMICONDUCTOR SOLUTIONS CO LTD0 citations51

IMAMURA MASANORI

1 patent
US8580340B2Nov 12, 2013

Substrate processing apparatus and substrate processing method

IMAMURA MASANORI1 citations41