Inventor
IWASAKI MASAHIDE
JP21 patents
⚠️ This page may combine multiple inventors who share the name “IWASAKI MASAHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS7846293B2Dec 7, 2010
Plasma processing apparatus and method
TOKYO ELECTRON LTD42 citations89
US10145014B2Dec 4, 2018
Film forming apparatus
TOKYO ELECTRON LTD17 citations85
US7789962B2Sep 7, 2010
Device and method for controlling temperature of a mounting table, a program therefor, and a processing apparatus including same
TOKYO ELECTRON LTD8 citations83
US7419567B2Sep 2, 2008
Plasma processing apparatus and method
TOKYO ELECTRON LTD8 citations74
US9887068B2Feb 6, 2018
Plasma process apparatus
TOKYO ELECTRON LTD4 citations72
US9574267B2Feb 21, 2017
Plasma processing apparatus
TOKYO ELECTRON LTD2 citations71
US9831067B2Nov 28, 2017
Film-forming apparatus
TOKYO ELECTRON LTD2 citations70
US10513777B2Dec 24, 2019
Film formation device
TOKYO ELECTRON LTD2 citations69
US10844489B2Nov 24, 2020
Film forming apparatus and shower head
TOKYO ELECTRON LTD1 citations62
US10734197B2Aug 4, 2020
Plasma process apparatus
TOKYO ELECTRON LTD0 citations51
US9631274B2Apr 25, 2017
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations50
IWASAKI MASAHIDE
4 patentsUS9691591B2Jun 27, 2017
Plasma processing apparatus
IWASAKI MASAHIDE2 citations71
US8967082B2Mar 3, 2015
Plasma processing apparatus and gas supply device for plasma processing apparatus
IWASAKI MASAHIDE2 citations61
US8182869B2May 22, 2012
Method for controlling temperature of a mounting table
IWASAKI MASAHIDE1 citations50
US8262848B2Sep 11, 2012
Plasma processing apparatus and method
IWASAKI MASAHIDE0 citations47