Inventor

HARA SHIRO

JP27 patents

⚠️ This page may combine multiple inventors who share the name “HARA SHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HARA SHIRO

AIST

Encapsulated cleanroom system

Transport container automatic clamping mechanism

Process substrate with crystal orientation mark, method of detecting crystal orientation, and reading device of crystal orientation mark

Method of manufacturing semiconductor package using alignment mark on wafer

Circular support substrate for semiconductor

Surface mount package and manufacturing method thereof

Wet processing apparatus

Compact manufacturing device, and inter-device transport system for production line

Link-type transfer robot

System for integrating preceding steps and subsequent steps

Treatment liquid supply device using syringe, and wet treatment device

Columnar laminar flow generation device and method for generating columnar laminar flows

NAT INST ADVANCED IND SCIENCE & TECH

Converging mirror furnace

Yellow room system

Substrate transfer antechamber mechanism

Exposure apparatus and exposure method

Small production device and production system using the same

HARA SHIRO

Coupling system

Coupling transfer system

Device manufacturing apparatus

FUJIKOSHI MACHINERY CORP

Wafer polishing apparatus

Work processing apparatus and liquid chemical bag for the same

Method of manufacturing semiconductor wafers

NEC TOPPAN CIRCUIT SOLUTIONS

Solder, method for processing surface of printed wiring board, and method for mounting electronic part

NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECH AIST

Coupling transfer system

NAT INST OF ADVANCED IND SCIEN

Mounting structure of movable manufacturing device, fixing structure and movable manufacturing device

SANYO CO LTD

Free access floor structure, and manufacturing apparatus and carrier apparatus adapted for floor structure