Inventor
OU YANG LIANG-YUEH
TW10 patents
Patents
10 patentsUS10985061B2Apr 20, 2021
Methods for forming contact plugs with reduced corrosion
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10483165B2Nov 19, 2019
Methods for forming contact plugs with reduced corrosion
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10186456B2Jan 22, 2019
Methods for forming contact plugs with reduced corrosion
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10867845B2Dec 15, 2020
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10157785B2Dec 18, 2018
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10879114B1Dec 29, 2020
Conductive fill
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9786604B2Oct 10, 2017
Metal cap apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10636702B2Apr 28, 2020
Conductive interconnect structures in integrated circuits
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US10497615B2Dec 3, 2019
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10872815B2Dec 22, 2020
Conductive interconnect structures in integrated circuits
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50