Inventor
SANDERS DANIEL P
US53 patents
⚠️ This page may combine multiple inventors who share the name “SANDERS DANIEL P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
33 patentsUS7521094B1Apr 21, 2009
Method of forming polymer features by directed self-assembly of block copolymers
IBM115 citations98
US7521090B1Apr 21, 2009
Method of use of epoxy-containing cycloaliphatic acrylic polymers as orientation control layers for block copolymer thin films
IBM158 citations98
US9159558B2Oct 13, 2015
Methods of reducing defects in directed self-assembled structures
IBM65 citations97
US7514063B1Apr 7, 2009
Method for the purification of semiconducting single walled carbon nanotubes
IBM25 citations93
US7763319B2Jul 27, 2010
Method of controlling orientation of domains in block copolymer films
IBM18 citations92
US7678537B2Mar 16, 2010
Graded topcoat materials for immersion lithography
IBM44 citations92
US9768059B1Sep 19, 2017
High-chi block copolymers for interconnect structures by directed self-assembly
IBM12 citations84
US7883828B2Feb 8, 2011
Functionalized carbosilane polymers and photoresist compositions containing the same
IBM7 citations84
US9458353B1Oct 4, 2016
Additives for orientation control of block copolymers
IBM8 citations83
US9244345B1Jan 26, 2016
Non-ionic photo-acid generating polymers for resist applications
IBM13 citations83
US9107291B2Aug 11, 2015
Formation of a composite pattern including a periodic pattern self-aligned to a prepattern
IBM13 citations83
US7588879B2Sep 15, 2009
Graded spin-on organic antireflective coating for photolithography
IBM15 citations83
US10059820B2Aug 28, 2018
Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers
IBM3 citations72
US9879152B2Jan 30, 2018
Block copolymers for directed self-assembly applications
IBM2 citations72
US9574107B2Feb 21, 2017
Fluoro-alcohol additives for orientation control of block copolymers
IBM3 citations72
US7816069B2Oct 19, 2010
Graded spin-on organic antireflective coating for photolithography
IBM7 citations72
US9738765B2Aug 22, 2017
Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers
IBM4 citations71
US8940855B2Jan 27, 2015
Polymers bearing pendant pentafluorophenyl ester groups, and methods of synthesis and functionalization thereof
IBM2 citations63
US7906031B2Mar 15, 2011
Aligning polymer films
IBM4 citations63
US7824845B2Nov 2, 2010
Functionalized carbosilane polymers and photoresist compositions containing the same
IBM2 citations63
US11500285B2Nov 15, 2022
Multifunctional polymers
IBM0 citations62
US10831102B2Nov 10, 2020
Photoactive polymer brush materials and EUV patterning using the same
IBM1 citations62
US10345700B2Jul 9, 2019
Negative-tone resist compositions and multifunctional polymers therein
IBM1 citations62
US7989026B2Aug 2, 2011
Method of use of epoxy-containing cycloaliphatic acrylic polymers as orientation control layers for block copolymer thin films
IBM4 citations62
US8841770B2Sep 23, 2014
Semiconductor interconnect structure having enhanced performance and reliability
IBM2 citations61
US7951524B2May 31, 2011
Self-topcoating photoresist for photolithography
IBM3 citations57
US8754208B2Jun 17, 2014
Method of preparing cyclic carbonates, cyclic carbamates, cyclic ureas, cyclic thiocarbonates, cyclic thiocarbamates, and cyclic dithiocarbonates
IBM0 citations52
US10118989B2Nov 6, 2018
Methods of forming block polymers for directed self-assembly
IBM0 citations51
US10066040B2Sep 4, 2018
Additives for orientation control of block copolymers
IBM1 citations51
US9983475B2May 29, 2018
Fluorinated sulfonate esters of aryl ketones for non-ionic photo-acid generators
IBM0 citations51
US9950999B2Apr 24, 2018
Non-ionic low diffusing photo-acid generators
IBM0 citations51
US9951164B2Apr 24, 2018
Non-ionic aryl ketone based polymeric photo-acid generators
IBM0 citations51
US9562127B2Feb 7, 2017
Methods of forming block polymers for directed self-assembly
IBM0 citations51
CHENG JOY
7 patentsUS8114306B2Feb 14, 2012
Method of forming sub-lithographic features using directed self-assembly of polymers
CHENG JOY73 citations97
US8226838B2Jul 24, 2012
Method of forming polymer features by directed self-assembly of block copolymers
CHENG JOY40 citations94
US8491965B2Jul 23, 2013
Method of controlling orientation of domains in block copolymer films
CHENG JOY17 citations92
US8398868B2Mar 19, 2013
Directed self-assembly of block copolymers using segmented prepatterns
CHENG JOY14 citations83
US8084193B2Dec 27, 2011
Self-segregating multilayer imaging stack with built-in antireflective properties
CHENG JOY11 citations80
US9233840B2Jan 12, 2016
Method for improving self-assembled polymer features
CHENG JOY1 citations52
US8486489B2Jul 16, 2013
Methods for aligning polymer films and related structures
CHENG JOY1 citations52
DYNAMIC KNOWLEDGE TRANSFER LLC
2 patentsALLEN ROBERT D
2 patentsGOLDFARB DARIO L
2 patentsMATERIA INC
1 patentCOULEMBIER OLIVIER
1 patentCABRAL JR CYRIL
1 patentHEDRICK JAMES L
1 patentShowing the top 50 of 53 patents by PatentIndex Score.