Inventor
TAKOUDIS CHRISTOS G
US2 patents
Patents
2 patentsUS6818894B2Nov 16, 2004
Method and apparatus for characterization of ultrathin silicon oxide films using mirror-enhanced polarized reflectance fourier transform infrared spectroscopy
UNIV ILLINOIS11 citations69
US10214817B2Feb 26, 2019
Multi-metal films, alternating film multilayers, formation methods and deposition system
UNIV ILLINOIS4 citations64