Inventor
HOOGE JOSHUA S
US10 patents
Patents
10 patentsUS10020195B2Jul 10, 2018
Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists
TOKYO ELECTRON LTD8 citations83
US9618848B2Apr 11, 2017
Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes
TOKYO ELECTRON LTD12 citations83
US9519227B2Dec 13, 2016
Metrology for measurement of photosensitizer concentration within photo-sensitized chemically-amplified resist (PS-CAR)
TOKYO ELECTRON LTD12 citations83
US9711419B2Jul 18, 2017
Substrate backside texturing
TOKYO ELECTRON LTD3 citations72
US9454081B2Sep 27, 2016
Line pattern collapse mitigation through gap-fill material application
TOKYO ELECTRON LTD4 citations72
US10403501B2Sep 3, 2019
High-purity dispense system
TOKYO ELECTRON LTD3 citations71
US10262880B2Apr 16, 2019
Cover plate for wind mark control in spin coating process
TOKYO ELECTRON LTD4 citations70
US12165870B2Dec 10, 2024
Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists
TOKYO ELECTRON LTD0 citations62
US10534266B2Jan 14, 2020
Methods and techniques to use with photosensitized chemically amplified resist chemicals and processes
TOKYO ELECTRON LTD0 citations51
US10354872B2Jul 16, 2019
High-precision dispense system with meniscus control
TOKYO ELECTRON LTD0 citations39