Inventor
TAKEAKI REI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “TAKEAKI REI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
7 patentsUS11380562B2Jul 5, 2022
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations59
US10790151B2Sep 29, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations51
US10727091B2Jul 28, 2020
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations48
US10438821B2Oct 8, 2019
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations48
US10699895B2Jun 30, 2020
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations38
US10685829B2Jun 16, 2020
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations38
US10593569B2Mar 17, 2020
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations38