Inventor

HOUWELING ZOMER SILVESTER

NL3 patents

Patents

3 patents

US10712656B2Jul 14, 2020

Method for manufacturing a membrane assembly

ASML NETHERLANDS BV4 citations70

US11567399B2Jan 31, 2023

EUV pellicles

ASML NETHERLANDS BV0 citations55

US11237475B2Feb 1, 2022

EUV pellicles

ASML NETHERLANDS BV0 citations55